Concepedia

C. Pavelescu

CP

Statistics

Publications

5

Citations

122

H-Index

5

Active since

1983

Affiliations

Center of Technology and Engineering for Nuclear Projects(Current)

C. Pavelescu is an author at Center of Technology and Engineering for Nuclear Projects specializing in natural sciences, materials science, and silicon dioxide.

Publications per year

1983–1984

5

Publications

5

A Theoretical Study of the Low‐Temperature Chemical Vapor Deposition of SiO2 Films

C. Cobianu, C. Pavelescu · Journal of The Electrochemical Society · 1983 · 45 citations

, , +17

Efficiency of the SiH4 oxidation reaction in chemical vapour deposition of SiO2 films at low temperature

C. Cobianu, C. Pavelescu · Thin Solid Films · 1983 · 34 citations

, , +17

An Infrared Absorption Study of LTCVD Silicon Dioxide

C. Pavelescu, C. Cobianu, A. Vancu · Journal of The Electrochemical Society · 1983 · 21 citations

, , +17

Etch rate behaviour of SiO2 films chemically vapour deposited from silane, oxygen and nitrogen gas mixtures at low temperatures

C. Pavelescu, C. Cobianu, L. Condriuc et al. · Thin Solid Films · 1984 · 11 citations

, , +17

An etch-rate study of thermally annealed LTCVD SiO2 films as a function of initial deposition conditions

C. Cobianu, C. Pavelescu · Journal of Materials Science Letters · 1984 · 11 citations

, , +16

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