Concepedia

Tom Omstead

TO

2

Publications

108

Citations

2

H-Index

1999

Active since

Affiliations

Veeco (United States)(Current)

Tom Omstead is an author at Veeco (United States) specializing in thin films, engineering, and applied physics.

Top concepts

Thin FilmsEngineeringApplied PhysicsMaterial ScienceMicrostructureSurface ScienceMicroelectronicsMicrofabricationIntegrated CircuitsElectronic Packaging

Publications per year

1999–2001

2

Publications

2

Atomic Layer Deposition of AlO[sub x] for Thin Film Head Gap Applications

Ajit Paranjpe, Sanjay Gopinath, Tom Omstead et al. · Journal of The Electrochemical Society · 2001 · 65 citations

Materials Science, Sweep Gas, Aluminium Nitride +11

Ultralarge scale integrated metallization and interconnects

Christine Todd Whitman, Mehrdad M. Moslehi, Ajit Paranjpe et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1999 · 43 citations

Engineering, Cluster Mocvd Technology, Integrated Circuits +20

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