Concepedia

M. Dolle

MD

Statistics

Publications

4

Citations

94

H-Index

4

Active since

1993

Affiliations

Forschungszentrum Jülich(Current)

M. Dolle is an author at Forschungszentrum Jülich specializing in engineering, applied physics, and chemistry.

Top concepts

EngineeringApplied PhysicsChemistrySurface ScienceMaterial ScienceIntegrated CircuitsCorrosionNanotechnologySemiconductorsNanoelectronics

Publications per year

1993–1999

4

Publications

4

Nanometer patterning of epitaxial CoSi2/Si(100) for ultrashort channel Schottky barrier metal–oxide–semiconductor field effect transistors

Qing‐Tai Zhao, F. Klinkhammer, M. Dolle et al. · Applied Physics Letters · 1999 · 38 citations

Epitaxial Cosi2, Nanometer Patterning, Engineering +17

Patterning method for silicides based on local oxidation

S. Mantl, M. Dolle, S. Mesters et al. · Applied Physics Letters · 1995 · 26 citations

Engineering, Chemical Analysis, Oxidation Resistance +19

Submicrometer patterning of cobaltdisilicide layers by local oxidation

F. Klinkhammer, M. Dolle, L. Kappius et al. · Microelectronic Engineering · 1997 · 17 citations

Surface Characterization, Engineering, Corrosion +5

Ion beam synthesis of buried CrSi2 layers

Chr. Dudda, S. Mantl, Ch. Dieker et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1993 · 13 citations

Materials Science, Ion Implantation, Engineering +3

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