Concepedia

M. Hariharaputhiran

MH

Statistics

Publications

6

Citations

307

H-Index

6

Active since

1998

Affiliations

Clarkson University(Current)

Materials Processing (United States)

M. Hariharaputhiran is an author at Clarkson University specializing in polishing, polishing processes, and surface science.

Publications per year

1998–2001

6

Publications

6

Hydroxyl Radical Formation in H[sub 2]O[sub 2]-Amino Acid Mixtures and Chemical Mechanical Polishing of Copper

M. Hariharaputhiran, J. Zhang, S. Ramarajan et al. · Journal of The Electrochemical Society · 2000 · 126 citations

Natural Sciences, Chemical Engineering, Chemistry +17

Chemical–mechanical polishing of copper and tantalum with silica abrasives

Y. Li, M. Hariharaputhiran, S. V. Babu · Journal of materials research/Pratt's guide to venture capital sources · 2001 · 66 citations

Engineering, Materials Engineering, Materials Science +13

The settling of spheres in a viscoplastic fluid

M. Hariharaputhiran, R. Shankar Subramanian, Gregory A. Campbell et al. · Journal of Non-Newtonian Fluid Mechanics · 1998 · 52 citations

Engineering, Biophysics, Fluid Dynamics +9

Chemical Mechanical Polishing of Ta

M. Hariharaputhiran · Electrochemical and Solid-State Letters · 1999 · 35 citations

Natural Sciences, Materials Engineering, Materials Science +13

Hardness of submicrometre abrasive particles and polish rate measurements

S. Ramarajan, M. Hariharaputhiran · Surface Engineering · 1999 · 16 citations

Natural Sciences, Materials Engineering, Materials Science +17

1–5 of 6