Concepedia

Hiroshi Moriguchi

HM

2

Publications

30

Citations

2

H-Index

1997

Active since

Affiliations

Kyoto University(Current)

Kyoto Institute of Technology

Hiroshi Moriguchi is an author at Kyoto University specializing in applied physics, natural sciences, and plasma physics.

Top concepts

ChemistryEngineeringSpectroscopyPlasma PhysicsApplied PhysicsSurface ScienceNatural SciencesPhysicsNanotechnologyElectrochemistry

Publications per year

1997–1998

2

Publications

2

Silicon surfaces treated by CF4, CF4/H2, and CF4/O2 rf plasmas: Study by <i>in situ</i> Fourier transform infrared ellipsometry

Tatsuru Shirafuji, W. W. Stoffels, Hiroshi Moriguchi et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1997 · 15 citations

Engineering, Reaction Layer, Plasma Physics +19

Investigations of the surface chemistry of silicon substrates etched in a rf-biased inductively coupled fluorocarbon plasma using Fourier-transform infrared ellipsometry

G. M. W. Kroesen, Ho-Jun Lee, Hiroshi Moriguchi et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1998 · 15 citations · Full text

Ftir Ellipsometry, Engineering, Plasma Physics +18

Rows per page

1–2 of 2