Concepedia

I. Morey

IM

1

Publications

17

Citations

1

H-Index

2000

Active since

Affiliations

Lam Research (United States)(Current)

I. Morey is an author at Lam Research (United States) specializing in materials engineering, chemistry, and chemical engineering.

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Publications per year

2000–2000

1

Publications

1

Etching of organic low dielectric constant material SiLK™ on the Lam Research Corporation 4520XL<scp>E</scp>™

C. Janowiak, S.L. Ellingboe, I. Morey · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2000 · 17 citations

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