Concepedia
1
Publications
13
Citations
H-Index
2012
Active since
Affiliations
SUSS MicroTec (Germany)(Current)
M. Ruhland is an author at SUSS MicroTec (Germany) specializing in computer engineering, microfabrication, and engineering.
Top concepts
EngineeringMicrofabricationComputer Engineering
Publications per year
2012–2012
Mask aligner lithography simulation – From lithography simulation to process validation
Kristian Motzek, Stefan Partel, Arianna Bramati et al. · Microelectronic Engineering · 2012 · 13 citations
Engineering, Electron-beam Lithography, Beam Lithography +6
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