Huseyin Ekinci

Electron beam lithography on nonplanar and irregular surfaces

Chenxu Zhu, Huseyin Ekinci, Aixi Pan et al. · Microsystems & Nanoengineering · 2024 · 55 citations · Full text

Experimental realization of neutron helical waves

Dusan Sarenac, Melissa E. Henderson, Huseyin Ekinci et al. · Science Advances · 2022 · 36 citations · Full text

Spin-orbit Correlations, Spintronics, Engineering +15

Effect of annealing on the structural, optical and surface properties of chromium oxide (Cr2O3) thin films deposited by e-beam evaporation for plasma etching applications

Huseyin Ekinci, Mohammad Soltani, Navid M. S. Jahed et al. · Journal of Alloys and Compounds · 2021 · 25 citations

Materials Engineering, Materials Science, Optical Materials +11

Effects of mask material conductivity on lateral undercut etching in silicon nano-pillar fabrication

Ripon Kumar Dey, Huseyin Ekinci, Bo Cui · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2020 · 22 citations

Engineering, Electron-beam Lithography, Silicon On Insulator +19

Plasma Etching of n-Type 4H-SiC for Photoconductive Semiconductor Switch Applications

Huseyin Ekinci, V. Kuryatkov, Daniel Mauch et al. · Journal of Electronic Materials · 2015 · 13 citations

Electrical Engineering, Engineering, Applied Physics +5