Concepedia
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Publications
1
Citations
18
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Active since
1980
S.U. Katzman is an author specializing in electrical engineering, very-large-scale integration, and manufacturing engineering.
Publications per year
1980–1980
Automated electrical measurements of registration errors in step-and-repeat optical lithography systems
T. Hasan, S.U. Katzman, David S. Perloff · IEEE Transactions on Electron Devices · 1980 · 18 citations
Engineering, Electrical Engineering, Manufacturing Engineering +17
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