Statistics
Publications
17
Citations
327
H-Index
12
Active since
2006
Misa Hayashida is an author at National Institute for Nanotechnology specializing in natural sciences, materials science, and electron microscopy.
Publications per year
2006–2023
17
17
Tungsten-based pillar deposition by helium ion microscope and beam-induced substrate damage
Kazuyuki Kohama, Tomohiko Iijima, Misa Hayashida et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2013 · 24 citations · Full text
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