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Sophie Thibaut

ST

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Publications

1

Citations

24

H-Index

1

Active since

2016

Affiliations

In-Q-Tel(Current)

Sophie Thibaut is an author at In-Q-Tel specializing in microelectronics, materials science, and materials engineering.

Top concepts

Publications per year

2016–2016

1

Publications

1

Self-aligned quadruple patterning integration using spacer on spacer pitch splitting at the resist level for sub-32nm pitch applications

Angélique Raley, Sophie Thibaut, Nihar Mohanty et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 24 citations

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