Bart Paarhuis is an author at ASML (Netherlands) specializing in engineering, microelectronics, and electrical engineering.
Top concepts
EngineeringMicroelectronics3D PrintingNanotechnologyApplied PhysicsInstrumentationMaterial ScienceMicrofabricationComputer EngineeringElectrical Engineering
Publications per year
2007–2012
2
2
Extending 1.35 NA immersion lithography down to 1x nm production nodes
Igor Bouchoms, Martijn Leenders, Jan Jaap Kuit et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 16 citations
Engineering, Electron-beam Lithography, Na Immersion Technology +17
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