Concepedia

Author

Akihiro Higuchi

Rigaku (Japan)

Also Known As

A. Higuchi, Akifusa Higuchi, Akihiro HIGUCHI, Akihiro Higuchi

13

Publications

21

Citations

2

H-Index

12

Concepts

All Affiliations

Rigaku (Japan)
AH

About

Akihiro Higuchi is an author at Rigaku (Japan) specializing in applied physics, x-ray spectroscopy, and nanotechnology.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

1

1

14

2

Applied Physics

1

1

14

3

Materials Science

1

1

14

4

Physics

1

1

14

5

Microelectronics

1

1

14

Akihiro Higuchi

×

1

Publications

14

Citations

1

H-Index

YearCitations

Characterization of cross-sectional profile of resist L/S and hole pattern using CD-SAXS

Yoshiyuki Ito, Akihiro Higuchi, Kazuhiko Omote

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2016

14

Page 1