Concepedia

Mitsuhiro Hata

MH

Statistics

Publications

2

Citations

21

H-Index

2

Active since

2004

Affiliations

Samsung (South Korea)(Current)

Mitsuhiro Hata is an author at Samsung (South Korea) specializing in electrical engineering, microfabrication, and materials science.

Top concepts

Publications per year

2004–2006

2

Publications

2

Converging lithography by combination of electrostatic layer-by-layer self-assembly and 193nm photolithography: Top-down meets bottom-up

Jung Hwan Hah, Subramanya Mayya, Mitsuhiro Hata et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2006 · 11 citations

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Most Efficient Alternative Manner of Patterning sub-80 nm Contact Holes and Trenches with 193 nm Lithography

Jung Hwan Hah, Jin-Young Yoon, Mitsuhiro Hata et al. · Japanese Journal of Applied Physics · 2004 · 10 citations

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