Concepedia

A. Claβen

AC

1

Publications

14

Citations

1

H-Index

1992

Active since

Affiliations

University of Würzburg(Current)

A. Claβen is an author at University of Würzburg specializing in instrumentation, engineering, and optoelectronics.

Top concepts

Publications per year

1992–1992

1

Publications

1

High voltage electron beam lithography of the resolution limits of SAL 601 negative resist

A. Claβen, S. Kuhn, J. Straka et al. · Microelectronic Engineering · 1992 · 14 citations

, , +11

Rows per page

1–1 of 1