Concepedia

Author

A. Claβen

University of Würzburg

Also Known As

A. Claβen

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Publications

14

Citations

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H-Index

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Concepts

All Affiliations

University of Würzburg
AC

About

A. Claβen is an author at University of Würzburg specializing in instrumentation, engineering, and optoelectronics.

Top Concepts

#ConceptH-IndexPublicationsCitations

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Engineering

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Applied Physics

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Electrical Engineering

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Microelectronics

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Optoelectronics

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A. Claβen

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1

Publications

14

Citations

1

H-Index

YearCitations

High voltage electron beam lithography of the resolution limits of SAL 601 negative resist

A. Claβen, S. Kuhn, J. Straka,

Microelectronic Engineering

1992

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