Arnaud Allézy

Commissioning an EUV mask microscope for lithography generations reaching 8 nm

Kenneth A. Goldberg, Iacopo Mochi, Markus P. Benk et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 45 citations · Full text

Engineering, Physics, Instrumentation +11

Actinic mask imaging: recent results and future directions from the SHARP EUV microscope

Kenneth A. Goldberg, Markus P. Benk, Antoine Wojdyla et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 24 citations

Natural Sciences, Physics, Biomedical Optics +8

The SEMATECH high-NA actinic reticle review project (SHARP) EUV mask-imaging microscope

Kenneth A. Goldberg, Iacopo Mochi, Markus P. Benk et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 15 citations · Full text

Natural Sciences, Biomedical Engineering, Biomedical Optics +12

Soft x-ray spectroscopy of high pressure liquid

Ruimin Qiao, Yujian Xia, Xuefei Feng et al. · Review of Scientific Instruments · 2018 · 14 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +15

On the correction capability of a deployed tape-spring hexapod

Gwenaëlle Aridon, Laurent Blanchard, Arnaud Allézy et al. · Mechanism and Machine Theory · 2007 · 11 citations · Full text

Engineering, Mechanical Engineering, Robotics Engineering +4