Diederik Maas

Sub-10-nm nanolithography with a scanning helium beam

Vadim Sidorkin, Emile van Veldhoven, E. van der Drift et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2009 · 134 citations · Full text

High Resolution, Engineering, Electron-beam Lithography +17

Nanopillar growth by focused helium ion-beam-induced deposition

Ping Chen, Emile van Veldhoven, Colin A. Sanford et al. · Nanotechnology · 2010 · 55 citations · Full text

Charging effects in quantum dots at high magnetic fields

N. C. van der Vaart, A. T. Charlie Johnson, Leo P. Kouwenhoven et al. · Physica B Condensed Matter · 1993 · 54 citations

Engineering, Physics, Applied Physics +4

Nanofabrication with a helium ion microscope

Diederik Maas, Emile van Veldhoven, Ping Chen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 51 citations · Full text

Beam induced deposition of platinum using a helium ion microscope

Colin A. Sanford, Lewis Stern, Louise Barriss et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2009 · 47 citations · Full text

Engineering, Microscopy, Target Fabrication +20