Fieke van den Bruele

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Active since

2015

Affiliations

Eindhoven University of Technology(Current)

Fieke van den Bruele is an author at Eindhoven University of Technology specializing in materials science, electronic materials, and materials engineering.

ORCID

Publications per year

2015–2016

Publications

Cyclic Etch/Passivation-Deposition as an All-Spatial Concept toward High-Rate Room Temperature Atomic Layer Etching

F. Roozeboom, Fieke van den Bruele, Y. Creyghton et al. · ECS Journal of Solid State Science and Technology · 2015 · 28 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Plasma-Enhanced Atmospheric-Pressure Spatial ALD of Al2O3 and ZrO2

Yves Creyghton, A. Illiberi, A. Mione et al. · ECS Transactions · 2016 · 18 citations

Natural Sciences, Materials Engineering, Materials Science +15

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