Concepedia

A. Illiberi

AI

34

Publications

1.1K

Citations

21

H-Index

2004

Active since

Affiliations

Eindhoven University of Technology(Current)

Holst Centre (Netherlands)

Delft University of Technology

Netherlands Organisation for Applied Scientific Research

Istituto Nazionale di Fisica Nucleare, Sezione di Milano

A. Illiberi is an author at Eindhoven University of Technology specializing in engineering, applied physics, and materials science.

Top concepts

Publications per year

2004–2022

34

Publications

34

Spatial Atomic Layer Deposition of Zinc Oxide Thin Films

A. Illiberi, F. Roozeboom, Paul Poodt · ACS Applied Materials & Interfaces · 2011 · 106 citations

, , +11

Research Update: Atmospheric pressure spatial atomic layer deposition of ZnO thin films: Reactors, doping, and devices

Robert L. Z. Hoye, David Muñoz‐Rojas, Shelby F. Nelson et al. · APL Materials · 2015 · 81 citations · Full text

, , +14

Low temperature and roll-to-roll spatial atomic layer deposition for flexible electronics

Paul Poodt, Raymond Knaapen, A. Illiberi et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2011 · 79 citations · Full text

, , +16

Spatial Atmospheric Atomic Layer Deposition of In<sub><i>x</i></sub>Ga<sub><i>y</i></sub>Zn<sub><i>z</i></sub>O for Thin Film Transistors

A. Illiberi, Brian Cobb, Abhishek Sharma et al. · ACS Applied Materials & Interfaces · 2015 · 65 citations

, , +15

On the kinetics of spatial atomic layer deposition

Paul Poodt, Joep van Lieshout, A. Illiberi et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2012 · 53 citations · Full text

, , +12

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