Concepedia

S. A. Campbell

SA

3

Publications

103

Citations

3

H-Index

1998

Active since

Affiliations

University of Minnesota(Current)

S. A. Campbell is an author at University of Minnesota specializing in applied physics, materials science, and engineering.

Top concepts

EngineeringApplied PhysicsMaterial ScienceChemistryThin FilmsMicrofabricationNanomanufacturingNanomaterialsNanostructuresNanotechnology

Publications per year

1998–2003

3

Publications

3

Synthesis of highly oriented, single-crystal silicon nanoparticles in a low-pressure, inductively coupled plasma

Ameya Bapat, Christopher R. Perrey, S. A. Campbell et al. · Journal of Applied Physics · 2003 · 78 citations

Engineering, Chemistry, Plasma Processing +17

Investigation of particle formation during the plasma enhanced chemical vapor deposition of amorphous silicon, oxide, and nitride films

Nagaraja Rao, Z. Wu, Sandeep Nijhawan et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 14 citations

Engineering, Vacuum Device, Plasma Processing +20

Investigation of Particle Generation during the Low‐Pressure Chemical Vapor Deposition of Borophosphosilicate Glass Films

Nagaraja Rao, Sandeep Nijhawan, T Kim et al. · Journal of The Electrochemical Society · 1998 · 11 citations

Engineering, Borophosphosilicate Glass Films, Glass Material +18

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