Concepedia

Pierluigi Rigolli

PR

Statistics

Publications

3

Citations

42

H-Index

3

Active since

2007

Affiliations

STMicroelectronics (Italy)(Current)

STMicroelectronics (Switzerland)

Pierluigi Rigolli is an author at STMicroelectronics (Italy) specializing in integrated circuit design, semiconductor devices, and engineering.

Publications per year

2007–2010

3

Publications

3

Sub-k1 = 0.25 lithography with double patterning technique for 45-nm technology node flash memory devices at λ = 193nm

Gianfranco Capetti, Pietro Cantù, Elisa Galassini et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 18 citations

, , +13

Laser bandwidth effect on overlay budget and imaging for the 45 nm and 32nm technology nodes with immersion lithography

Umberto Iessi, Michiel Kupers, Elio De Chiara et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 14 citations

, , +16

Double patterning overlay and CD budget for 32 nm technology node

Umberto Iessi, Sara Loi, A. Salerno et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 10 citations

, , +10

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