Concepedia
2
Publications
20
Citations
H-Index
2004
Active since
Affiliations
Physikalisch-Technische Bundesanstalt(Current)
Max C. Schuermann is an author at Physikalisch-Technische Bundesanstalt.
Publications per year
2004–2004
Status of EUV-lamp development and demonstration of applications
R. Lebert, Christian Wies, Bernhard Jaegle et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 10 citations
Metrology tools for EUV-source characterization and optimization
Thomas Missalla, Max C. Schuermann, R. Lebert et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 10 citations
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