Concepedia

Mingying Ma

MM

4

Publications

60

Citations

4

H-Index

2006

Active since

Affiliations

Chinese Academy of Sciences(Current)

Shanghai Institute of Optics and Fine Mechanics

Mingying Ma is an author at Chinese Academy of Sciences specializing in calibration, instrumentation, and engineering.

Top concepts

CalibrationEngineeringInstrumentationEducationMicroscopyMeasurementOphthalmologyOptical AlignmentOptical PropertiesOptical Systems

Publications per year

2006–2007

4

Publications

4

Aberration measurement of projection optics in lithographic tools based on two-beam interference theory

Mingying Ma, Xiangzhao Wang, Fan Wang · Applied Optics · 2006 · 20 citations

Engineering, Measurement, Microscopy +17

Aberration measurement of projection optics in lithographic tools by use of an alternating phase-shifting mask

Fan Wang, Xiangzhao Wang, Mingying Ma et al. · Applied Optics · 2006 · 17 citations

Engineering, Microscopy, Odd Aberrations +18

Coma measurement of projection optics in lithographic tools based on relative image displacements at multiple illumination settings

Qiongyan Yuan, Xiangzhao Wang, Zicheng Qiu et al. · Optics Express · 2007 · 12 citations · Full text

Engineering, Measurement, Optic Design +18

Measurement technique for in situ characterizing aberrations of projection optics in lithographic tools

Fan Wang, Xiangzhao Wang, Mingying Ma · Applied Optics · 2006 · 11 citations

Engineering, Measurement, Microscopy +18

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