Concepedia

Yuk-Hong Ting

YT

Statistics

Publications

3

Citations

174

H-Index

3

Active since

2006

Affiliations

University of Wisconsin–Madison(Current)

Yuk-Hong Ting is an author at University of Wisconsin–Madison specializing in plasma etching, natural sciences, and polymer thin films.

Publications per year

2006–2008

3

Publications

3

Plasma etch removal of poly(methyl methacrylate) in block copolymer lithography

Yuk-Hong Ting, Sang-Min Park, Chi‐Chun Liu et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2008 · 95 citations

, , +17

Pattern transfer using poly(styrene-<i>block</i>-methyl methacrylate) copolymer films and reactive ion etching

Chi‐Chun Liu, Paul F. Nealey, Yuk-Hong Ting et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2007 · 65 citations

, , +17

Measurement of plasma potential fluctuations by emissive probes in CF<sub>4</sub>radio-frequency plasma

Dongsoo Lee, Yuk-Hong Ting, Lütfi Öksüz et al. · Plasma Sources Science and Technology · 2006 · 14 citations

, , +12

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