T. J. Stark

Chemically and geometrically enhanced focused ion beam micromachining

P. E. Russell, T. J. Stark, D. P. Griffis et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 56 citations

Materials Science, Materials Engineering, Chemical Engineering +15

H2O enhanced focused ion beam micromachining

T. J. Stark, G. M. Shedd, Jim Vitarelli et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 53 citations

Materials Engineering, Materials Science, Chemical Engineering +15

Electron beam induced metalization of palladium acetate

T. J. Stark, T. M. Mayer, D. P. Griffis et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 37 citations · Full text

Engineering, Electron-beam Lithography, Chemistry +16

Silicon structures for <i>in situ</i> characterization of atomic force microscope probe geometry

Konrad Jarausch, T. J. Stark, and P. E. Russell · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 20 citations

Engineering, Microscopy, Afm Information +22

Formation of complex features using electron-beam direct-write decomposition of palladium acetate

T. J. Stark, T. M. Mayer, D. P. Griffis et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 20 citations

Complex Features, Engineering, Electron-beam Lithography +19