Tuung Luoh

Advanced tungsten plug process for beyond nanometer technology

Tuung Luoh, Chin-Ta Su, Ta-Hung Yang et al. · Microelectronic Engineering · 2008 · 35 citations

Natural Sciences, Materials Engineering, Materials Science +8

Dislocation-free zones in fatigued copper polycrystals

Tuung Luoh, C.P. Chang · Acta Materialia · 1996 · 26 citations

Natural Sciences, Materials Engineering, Materials Science +14

CMP Process Optimization Engineering by Machine Learning

Hsiang-Meng Yu, Chih‐Chen Lin, Min-Hsuan Hsu et al. · IEEE Transactions on Semiconductor Manufacturing · 2021 · 26 citations

Engineering, Manufacturing Engineering, Machine Learning +10

Stress release for shallow trench isolation by single-wafer, rapid-thermal steam oxidation

Tuung Luoh, C.S. Chen, Lijian Yang et al. · 2003 · 10 citations

Engineering, Materials Engineering, Materials Science +17

TiCl4 Barrier Process Engineering in Semiconductor Manufacturing

Tuung Luoh, Yu-Kai Huang, Yung-Tai Hung et al. · Coatings · 2016 · 10 citations · Full text

Engineering, Materials Engineering, Materials Science +17