B.N. Gaifullin

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Active since

1993

Affiliations

Institute of Microelectronics Technology and High Purity Materials(Current)

B.N. Gaifullin is an author at Institute of Microelectronics Technology and High Purity Materials specializing in electron beam lithography, engineering, and three-dimensional nanostructuring.

Publications per year

1993–1995

Publications

Evaluation, verification and error determination of proximity parameters α, β and ν in electron beam lithography

S. V. Dubonos, B.N. Gaifullin, H.F. Raith et al. · Microelectronic Engineering · 1993 · 14 citations

Engineering, Electrical Engineering, Metrology +10

Three-dimensional design in electron-beam lithography

V. V. Aristov, S. V. Dubonos, R. Ya. Dyachenko et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 13 citations

Engineering, Materials Engineering, Materials Science +17

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