Concepedia

Zubin P. Patel

ZP

1

Publications

27

Citations

1

H-Index

2001

Active since

Zubin P. Patel is an author specializing in materials science, materials characterization, and thin films.

Top concepts

ChemistryThin FilmsEngineeringApplied PhysicsNanofabricationSurface ScienceMaterial ScienceNanomanufacturingChemical EngineeringMaterials Engineering

Publications per year

2001–2001

1

Publications

1

Low temperature metalorganic chemical vapor deposition of conformal silver coatings for applications in high aspect ratio structures

Eric Eisenbraun, A. Klaver, Zubin P. Patel et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 27 citations · Full text

Engineering, Surface Nanotechnology, Metallic Nanomaterials +18

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