Statistics
Publications
7
Citations
575
H-Index
7
Active since
2005
M. Hermatschweiler is an author at Karlsruhe Institute of Technology specializing in engineering, materials science, and applied physics.
Publications per year
2005–2015
7
7
Three‐dimensional laser lithography
Michael Thiel, M. Hermatschweiler · Optik & Photonik · 2011 · 27 citations · Full text
Engineering, Electron-beam Lithography, Micromanufacturing +19
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