Concepedia

Author

Takuya Ogishima

Shizuoka University

Also Known As

Takuya Ogishima

4

Publications

38

Citations

2

H-Index

4

Concepts

All Affiliations

Shizuoka University
TO

About

Takuya Ogishima is an author at Shizuoka University specializing in applied physics, surface science, and electrical engineering.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

1

1

29

2

Applied Physics

1

1

29

3

Electrical Engineering

1

1

29

4

Surface Science

1

1

29

Takuya Ogishima

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1

Publications

29

Citations

1

H-Index

YearCitations

Silicon nitride film growth by remote plasma CVD using Tris(dimethylamino)silane

Toru Aoki, Takuya Ogishima, A. M. Wróbel,

Vacuum

1998

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