Concepedia

Y. Chen

YC

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Publications

1

Citations

28

H-Index

1

Active since

2003

Affiliations

University of Glasgow(Current)

Y. Chen is an author at University of Glasgow specializing in lift-off resist techniques, nanoelectronics, and cmos fabrication processes.

Publications per year

2003–2003

1

Publications

1

Fabrication of ultrashort T gates using a PMMA/LOR/UVIII resist stack

Y. Chen, D.S. Macintyre, Xiehong Cao et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 28 citations

Engineering, Electrical Engineering, Materials Science +13

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