4
Publications
153
Citations
4
H-Index
2014
Active since
Kurtis C. Fairley is an author at University of Oregon specializing in nanomaterials, nanotechnology, and engineering.
Top concepts
ChemistryEngineeringNanomaterialsNanotechnologyCrystallographySurface ScienceMaterial ScienceSurface ChemistryFunctional Materials
Publications per year
2014–2016
4
4
Sub-30 keV patterning of HafSOx resist: Effects of voltage on resolution, contrast, and sensitivity
Kurtis C. Fairley, Meredith C. Sharps, Gavin Mitchson et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2016 · 10 citations
Rows per page
1–4 of 4