Concepedia

Bryan Egan

BE

Statistics

Publications

3

Citations

37

H-Index

3

Active since

2018

Affiliations

GlobalFoundries (United States)(Current)

Bryan Egan is an author at GlobalFoundries (United States) specializing in manufacturing, materials engineering, and engineering.

Publications per year

2018–2019

3

Publications

3

Effect of Controlling Abrasive Size in Slurry for Tungsten Contact CMP Process

Bryan Egan, Hong Jin Kim · ECS Journal of Solid State Science and Technology · 2019 · 15 citations · Full text

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Study on the Mechanism of Nano-Flake Defect during Tungsten Contact Chemical Mechanical Polishing

Hong Jin Kim, Adam Lawyer, Bryan Egan et al. · ECS Journal of Solid State Science and Technology · 2018 · 11 citations

, , +10

A New Approach to the Formation Mechanism of Tungsten Void Defect in Chemical Mechanical Polishing

Hong Jin Kim, Bryan Egan, Xingzhao Shi et al. · ECS Journal of Solid State Science and Technology · 2018 · 11 citations

, , +15

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