Concepedia

Zheyao Wang

ZW

63

Publications

2.1K

Citations

27

H-Index

2000

Active since

Affiliations

Tsinghua University(Current)

Institute of Microelectronics

Zheyao Wang is an author at Tsinghua University specializing in engineering, microfabrication, and materials science.

Top concepts

EngineeringMaterial ScienceApplied PhysicsMicrofabricationMicroelectronicsElectronic PackagingElectrical EngineeringMechanical EngineeringNanoelectronics3D Printing

Publications per year

2000–2021

63

Publications

63

Motion Measurement Using Inertial Sensors, Ultrasonic Sensors, and Magnetometers With Extended Kalman Filter for Data Fusion

He Zhao, Zheyao Wang · IEEE Sensors Journal · 2011 · 182 citations

Engineering, Measurement, Field Robotics +23

Highly Sensitive Surface-Enhanced Raman Scattering Substrate Made from Superaligned Carbon Nanotubes

Yinghui Sun, Kai Liu, Jiao Miao et al. · Nano Letters · 2010 · 170 citations

Materials Science, Engineering, Carbon-based Material +12

Microsystems using three-dimensional integration and TSV technologies: Fundamentals and applications

Zheyao Wang · Microelectronic Engineering · 2019 · 105 citations

3D Ic Architecture, Electrical Engineering, Engineering +12

3-D Integration and Through-Silicon Vias in MEMS and Microsensors

Zheyao Wang · Journal of Microelectromechanical Systems · 2015 · 103 citations

Engineering, Commercial Mems/microsensor Products, Device Integration +16

A self-bended piezoresistive microcantilever flow sensor for low flow rate measurement

Qi Zhang, Wenzhou Ruan, Han Wang et al. · Sensors and Actuators A Physical · 2010 · 103 citations

Engineering, Microfabrication, Fluid Mechanics +6

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