S. E. Savas

Statistics

Publications

Citations

224

H-Index

Active since

1986

Affiliations

Applied Materials (United States)(Current)

University of California, Berkeley

S. E. Savas is an author at Applied Materials (United States) specializing in plasma physics, physics, and sheaths in capacitively coupled discharges.

Publications per year

1986–1991

Publications

Model of magnetically enhanced, capacitive RF discharges

M. A. Lieberman, A. J. Lichtenberg, S. E. Savas · IEEE Transactions on Plasma Science · 1991 · 94 citations

Natural Sciences, Electrical Engineering, Physics +15

Bias voltage in finite length, cylindrical and coaxial radio‐frequency discharges

M. A. Lieberman, S. E. Savas · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1990 · 65 citations

Engineering, Electrical Engineering, Physics +17

Observations of argon emission lines used for fluorine atom actinometry in low power rf discharges

S. E. Savas · Applied Physics Letters · 1986 · 34 citations

Natural Sciences, Physics, Plasma Physics +14

Capacitive probes for rf process plasmas

S. E. Savas, Kevin G. Donohoe · Review of Scientific Instruments · 1989 · 21 citations

Natural Sciences, Electrical Engineering, Physics +16

Dummy load technique for power efficiency estimation in rf discharges

S. E. Savas, D. E. Horne, R. W. Sadowski · Review of Scientific Instruments · 1986 · 10 citations

Engineering, Electrical Engineering, Physics +17

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