Concepedia

M. Hatano

MH

Statistics

Publications

4

Citations

47

H-Index

4

Active since

1967

Affiliations

Toshiba (Japan)(Current)

M. Hatano is an author at Toshiba (Japan) specializing in interface science, copper interconnects, and materials engineering.

Publications per year

1967–2008

4

Publications

4

EM lifetime improvement of Cu damascene interconnects by p-SiC cap layer

M. Hatano, T. Usui, Yoshiaki Shimooka et al. · 2003 · 14 citations

Engineering, Materials Engineering, Materials Science +16

Electromigration diffusion mechanism of electroplated copper and cold/hot two-step sputter-deposited aluminum-0.5-wt% copper damascene interconnects

T. Usui, H. Nasu, Toshiyuki Watanabe et al. · Journal of Applied Physics · 2005 · 13 citations

Natural Sciences, Materials Engineering, Materials Science +15

Investigation of Surface Film Boiling under Free Convection : (1st Report, An Experiment on Small Wires)

Kaneyasu NISHIKAWA, Ryutaro SHIMOMURA, M. Hatano et al. · Bulletin of JSME · 1967 · 10 citations · Full text

Engineering, Chemical Engineering, Mechanical Engineering +17

Copper Line Resistance Control and Reliability Improvement by Surface Nitridation of Ti barrier Metal

A. Sakata, Shuzo Kato, Yuuri Yano et al. · 2008 · 10 citations

Natural Sciences, Materials Engineering, Materials Science +14

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