Statistics
Publications
1
Citations
84
H-Index
1
Active since
2007
Affiliations
Paul Scherrer Institute(Current)
Philipp Käser is an author at Paul Scherrer Institute specializing in optical lithography, optics, and materials engineering.
Publications per year
2007–2007
1
1
Photon-beam lithography reaches 12.5nm half-pitch resolution
Harun H. Solak, Yasin Ekinci, Philipp Käser et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2007 · 84 citations · Full text
Engineering, Manufacturing Engineering, Materials Engineering +13
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