Feng Yong-jian

Design and fabrication of an absolute pressure MEMS capacitance vacuum sensor based on silicon bonding technology

Mahui Xu, Feng Yong-jian, Xiaodong Han et al. · Vacuum · 2021 · 37 citations

Electrical Engineering, Engineering, Microfabrication +8

Design and experiment of a touch mode MEMS capacitance vacuum gauge with square diaphragm

Xiaodong Han, Mahui Xu, Gang Li et al. · Sensors and Actuators A Physical · 2020 · 28 citations

Electrical Engineering, Engineering, Microfabrication +8

Design and fabrication of a D33-mode piezoelectric micro-accelerometer

Mahui Xu, Hui Zhou, Linhui Zhu et al. · Microsystem Technologies · 2019 · 21 citations

Electrical Engineering, Engineering, Microfabrication +6

Design and Fabrication of a MEMS Capacitance Vacuum Sensor Based on Silicon Buffer Block

Mahui Xu, Xiaodong Han, Chenxi Zhao et al. · Journal of Microelectromechanical Systems · 2020 · 21 citations

Electrical Engineering, Full Range, Engineering +11

Differential MEMS capacitance diaphragm vacuum gauge with high sensitivity and wide range

Xiaodong Han, Gang Li, Mahui Xu et al. · Vacuum · 2021 · 19 citations

Electrical Engineering, Electronic Instrumentation, Engineering +10