J.-L. Peyre is an author at Tokyo Electron (Japan) specializing in engineering, microfabrication, and applied physics.
Top concepts
EngineeringApplied PhysicsMicrofabricationPhotonics3D PrintingData ModelingNanophotonicsSelf-assemblyNanofabricationNanolithography
Publications per year
1993–2015
3
3
High-volume manufacturing equipment and processing for directed self-assembly applications
Mark Somervell, Takashi Yamauchi, Soichiro Okada et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 22 citations
Engineering, Electron-beam Lithography, Pattern Transfer +18
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1–3 of 3