Concepedia

Sungyool Kwon

SK

Statistics

Publications

4

Citations

78

H-Index

4

Active since

2017

Affiliations

Sungkyunkwan University(Current)

Sungyool Kwon is an author at Sungkyunkwan University specializing in applied physics, engineering, and materials science.

Top concepts

Publications per year

2017–2021

4

Publications

4

Effect of plasma power on properties of hydrogenated amorphous silicon carbide hardmask films deposited by PECVD

Sungyool Kwon, Yoon‐Soo Park, Wonjin Ban et al. · Vacuum · 2020 · 32 citations

, , +6

Al2O3 thin films prepared by plasma-enhanced chemical vapor deposition of dimethylaluminum isopropoxide

Wonjin Ban, Sungyool Kwon, Jae Hyun Nam et al. · Thin Solid Films · 2017 · 18 citations

, , +8

Ultralow dielectric constant SiCOH films by plasma enhanced chemical vapor deposition of decamethylcyclopentasiloxane and tetrakis(trimethylsilyloxy)silane precursors

Yoon‐Soo Park, Hyuna Lim, Sungyool Kwon et al. · Thin Solid Films · 2021 · 18 citations

, , +5

Single Precursor Based Ultra-Low <i>k</i> Thin Film Deposited with Tetrakis(trimethylsilyloxy)silane in PECVD System

Sungyool Kwon, Wonjin Ban, Hoonbae Kim et al. · Science of Advanced Materials · 2018 · 10 citations

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