Concepedia

Bruno Allain

BA

6

Publications

199

Citations

6

H-Index

1987

Active since

Affiliations

École Polytechnique(Current)

Centre National de la Recherche Scientifique

Laboratoire de Physique des Interfaces et des Couches Minces

Bruno Allain is an author at École Polytechnique specializing in applied physics, engineering, and chemistry.

Top concepts

Publications per year

1987–1991

6

Publications

6

a-Si:H Deposition from SiH<sub>4</sub>and Si<sub>2</sub>H<sub>6</sub>rf-Discharges: Pressure and Temperature Dependence of Film Growth in Relation to α-γ Discharge Transition

J. Perrin, Pere Roca i Cabarrocas, Bruno Allain et al. · Japanese Journal of Applied Physics · 1988 · 109 citations

, , +18

Modeling and diagnostics of silicon nitride deposition from 254-nm Hg photosensitization of SiH4-NH3 mixtures: Luminescence of HgNH3 excimer and laser-induced fluorescence of NH2(<i>A</i> 2<i>A</i>1)

Takashi Fuyuki, Bruno Allain, J. Perrin · Journal of Applied Physics · 1990 · 30 citations

Surface reactions of radicals during deposition of amorphous semiconductors by photochemical decomposition of molecular hydrides

J. Perrin, Bruno Allain · Journal of Non-Crystalline Solids · 1987 · 26 citations

, , +9

Quenching of excited mercury atoms (6 3P1 and 6 3P0) in collisions with SiH4, SiD4, Si2H6 and GeH4

J. Perrin, Bruno Allain · Chemical Physics · 1988 · 14 citations

, , +8

Kinetics of deposition and electrical properties of silicon nitride films obtained by 185 nm photolysis of SiH<sub>4</sub>-NH<sub>3</sub>mixtures

Jean Luc Guizot, P. Alnot, F. Wyczisk et al. · Semiconductor Science and Technology · 1991 · 10 citations

, , +16

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