Joachim Oberhammer

Selective wafer-level adhesive bonding with benzocyclobutene for fabrication of cavities

Joachim Oberhammer, Frank Niklaus, Göran Stemme · Sensors and Actuators A Physical · 2003 · 113 citations

Materials Science, Materials Engineering, Wafer Scale Processing +6

A Very Low Loss 220–325 GHz Silicon Micromachined Waveguide Technology

Bernhard Beuerle, James Campion, Umer Shah et al. · IEEE Transactions on Terahertz Science and Technology · 2018 · 100 citations · Full text

Waveguides, Engineering, Low Loss Silicon +17

Millimeter-Wave Tissue Diagnosis: The Most Promising Fields for Medical Applications

Fritzi Töpfer, Joachim Oberhammer · IEEE Microwave Magazine · 2015 · 99 citations

Engineering, Medical Technology, Breast Cancer Tissue +21

A Low-Profile and High-Gain Frequency Beam Steering Subterahertz Antenna Enabled by Silicon Micromachining

Adrian Gomez-Torrent, Maria García‐Vigueras, Laurent Le Coq et al. · IEEE Transactions on Antennas and Propagation · 2019 · 83 citations · Full text

Millimeter Wave Technology, Engineering, High-frequency Device +8

A Ruthenium-Based Multimetal-Contact RF MEMS Switch With a Corrugated Diaphragm

Feixiang Ke, Jianmin Miao, Joachim Oberhammer · Journal of Microelectromechanical Systems · 2008 · 81 citations

Engineering, Radio Frequency, Vacuum Device +18