Joachim Oberhammer

Selective wafer-level adhesive bonding with benzocyclobutene for fabrication of cavities

Joachim Oberhammer, Frank Niklaus, Göran Stemme · Sensors and Actuators A Physical · 2003 · 113 citations

Engineering, Materials Science, Cavity Preparation +7

A Very Low Loss 220–325 GHz Silicon Micromachined Waveguide Technology

Bernhard Beuerle, James Campion, Umer Shah et al. · IEEE Transactions on Terahertz Science and Technology · 2018 · 101 citations · Full text

Engineering, Electrical Engineering, Materials Science +17

Millimeter-Wave Tissue Diagnosis: The Most Promising Fields for Medical Applications

Fritzi Töpfer, Joachim Oberhammer · IEEE Microwave Magazine · 2015 · 100 citations

Engineering, Bioengineering, Biomedical Engineering +16

A Low-Profile and High-Gain Frequency Beam Steering Subterahertz Antenna Enabled by Silicon Micromachining

Adrian Gomez-Torrent, Maria García‐Vigueras, Laurent Le Coq et al. · IEEE Transactions on Antennas and Propagation · 2019 · 85 citations · Full text

Engineering, Electrical Engineering, Antennas +16

A Ruthenium-Based Multimetal-Contact RF MEMS Switch With a Corrugated Diaphragm

Feixiang Ke, Jianmin Miao, Joachim Oberhammer · Journal of Microelectromechanical Systems · 2008 · 81 citations

Engineering, Electrical Engineering, Materials Science +17