Concepedia

F.G. Boebel

FB

5

Publications

113

Citations

5

H-Index

1993

Active since

Affiliations

Fraunhofer Institute for Integrated Circuits(Current)

Technical University of Munich

F.G. Boebel is an author at Fraunhofer Institute for Integrated Circuits specializing in engineering, applied physics, and software testing.

Top concepts

EngineeringApplied PhysicsThin FilmsSurface ScienceComputer ScienceMaterial ScienceSoftware TestingSystems EngineeringPhysicsCalibration

Publications per year

1993–2002

5

Publications

5

In-situ control of Ga(A1)As MBE layers by pyrometric interferometry

H. Grothe, F.G. Boebel · Journal of Crystal Growth · 1993 · 36 citations

Surface Characterization, Engineering, Physics +5

Testing synergetic algorithms with industrial classification problems

Thomas Wagner, F.G. Boebel · Neural Networks · 1994 · 27 citations

Engineering, Machine Learning, Computational Testing +11

In situ film thickness and temperature control of molecular beam epitaxy growth by pyrometric interferometry

F.G. Boebel, H.J. Möller, Brigitte Hertel et al. · Journal of Crystal Growth · 1995 · 25 citations

Materials Science, Temperature Control, Epitaxial Growth +8

Simultaneous in situ measurement of film thickness and temperature by using multiple wavelengths pyrometric interferometry (MWPI)

F.G. Boebel, H.J. Möller · IEEE Transactions on Semiconductor Manufacturing · 1993 · 14 citations

Optical Materials, Engineering, Situ Quality Inspection +23

Cycle time reduction program at ACL

F.G. Boebel, O. Ruelle · 2002 · 11 citations

Mathematical Programming, Engineering, Electronic Design Automation +21

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