3
Publications
219
Citations
3
H-Index
1996
Active since
Affiliations
Sumitomo Electric Industries (Japan)(Current)
Makoto SETOYAMA is an author at Sumitomo Electric Industries (Japan) specializing in materials engineering, engineering, and applied physics.
Top concepts
EngineeringApplied PhysicsMaterial ScienceMaterials EngineeringCondensed Matter PhysicsSurface ScienceMicrofabrication
Publications per year
1996–2007
3
3
Formation of cubic-A1N in TiN/A1N superlattice
Makoto SETOYAMA, Akira Nakayama, Masato Tanaka et al. · Surface and Coatings Technology · 1996 · 156 citations
Thermal stability of TiN/AlN superlattices
Makoto SETOYAMA, Maki Irie, Hiroki Ohara et al. · Thin Solid Films · 1999 · 42 citations
Materials Engineering, Materials Science, Aluminium Nitride +6
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