Concepedia

Publication | Closed Access

Thermal stability of TiN/AlN superlattices

DOI

42

Citations

6

References

1999

Year

Makoto SETOYAMA, Maki Irie, Hiroki Ohara, Masanori Tsujioka, Y. Takeda, T. Nomura, N. Kitagawa
Thin Solid Films

References

YearCitations

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