Concepedia

Shinjiro Kimura Shinjiro Kimura

SK

2

Publications

29

Citations

2

H-Index

1997

Active since

Affiliations

Tokyo University of Science(Current)

Shinjiro Kimura Shinjiro Kimura is an author at Tokyo University of Science specializing in engineering, applied physics, and physics.

Top concepts

PhysicsEngineeringApplied PhysicsChemistryThin FilmsPulse PowerNanotechnologyPlasma PhysicsPlasma ScienceSurface Science

Publications per year

1997–1998

2

Publications

2

Oxynitridation of Silicon Using Helicon-Wave Excited and Inductively-Coupled Nitrogen Plasma

Yoshinaga Okamoto Yoshinaga Okamoto, Shinjiro Kimura Shinjiro Kimura, Hideaki Ikoma · Japanese Journal of Applied Physics · 1997 · 18 citations

Engineering, Chemistry, Silicon On Insulator +17

Pulsed Fowler–Nordheim current stress resistance of Si oxynitride grown with helicon-wave excited nitrogen–argon plasma

Yoshinaga Okamoto Yoshinaga Okamoto, Shinjiro Kimura Shinjiro Kimura, Fumihito Oka et al. · Journal of Applied Physics · 1998 · 11 citations

Electrical Engineering, Plasma Electronics, Engineering +13

Rows per page

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