Concepedia

Shengjun Guo

SG

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Publications

3

Citations

49

H-Index

3

Active since

2018

Affiliations

NAURA (China)(Current)

Shengjun Guo is an author at NAURA (China) specializing in silicon etching, etching processes, and etching.

Publications per year

2018–2019

3

Publications

3

Deep Dry Etching of Silicon with Scallop Size Uniformly Larger than 300 nm

Yuanwei Lin, Renzhi Yuan, Xinshuai Zhang et al. · Silicon · 2018 · 20 citations

, , +12

Uniformity improvement of deep silicon cavities fabricated by plasma etching with 12-inch wafer level

Yongqin Cui, Shijie Jian, Cheng Chen et al. · Journal of Micromechanics and Microengineering · 2019 · 19 citations

, , +14

A model for etching of three-dimensional high aspect ratio silicon structures in pulsed inductively coupled plasmas

J-C Wang, Wei Tian, Shahid Rauf et al. · Plasma Sources Science and Technology · 2018 · 10 citations · Full text

, , +17

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