Statistics
Publications
12
Citations
642
H-Index
11
Active since
2013
Xinshuai Zhang is an author at Institute of High Energy Physics specializing in engineering, materials engineering, and materials science.
Publications per year
2013–2024
12
12
Deep Dry Etching of Silicon with Scallop Size Uniformly Larger than 300 nm
Yuanwei Lin, Renzhi Yuan, Xinshuai Zhang et al. · Silicon · 2018 · 20 citations
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