Mu-Hsuan Chan

X-ray photoelectron spectroscopy analyses of titanium oxynitride films prepared by magnetron sputtering using air/Ar mixtures

Mu-Hsuan Chan, Fu‐Hsing Lu · Thin Solid Films · 2009 · 85 citations

Materials Science, X-ray Spectroscopy, Engineering +7

Preparation of titanium oxynitride thin films by reactive sputtering using air/Ar mixtures

Mu-Hsuan Chan, Fu‐Hsing Lu · Surface and Coatings Technology · 2008 · 57 citations

Materials Science, Materials Engineering, Engineering +7

Characterization of N-doped TiO2 films prepared by reactive sputtering using air/Ar mixtures

Mu-Hsuan Chan, Fu‐Hsing Lu · Thin Solid Films · 2009 · 47 citations

Materials Science, Materials Engineering, Engineering +8

Preparation of ZrNxOy films by magnetron sputtering using air as a reactive gas

Mu-Hsuan Chan, Po-Lun Wu, Fu‐Hsing Lu · Thin Solid Films · 2010 · 34 citations

Materials Engineering, Materials Science, Engineering +7

Air-based deposition and processing windows of sputtered TiN, TiNxOy, and N-doped TiOx thin films

Mu-Hsuan Chan, Fu‐Hsing Lu · Surface and Coatings Technology · 2012 · 23 citations

Materials Science, Engineering, Thin-film Fabrication +11