Guanyong Yan

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Active since

2012

Affiliations

Shanghai Micro Electronics Equipment (China)(Current)

Shanghai Institute of Optics and Fine Mechanics

Guanyong Yan is an author at Shanghai Micro Electronics Equipment (China) specializing in optics, optical aberration modeling, and zernike polynomials.

Publications per year

2012–2013

Publications

Practical application of aerial image by principal component analysis to measure wavefront aberration of lithographic lens

Lifeng Duan, Xiangzhao Wang, Guanyong Yan et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2012 · 11 citations

Natural Sciences, Vision Science, Digital Imaging +12

High-order aberration measurement technique based on a quadratic Zernike model with optimized source

Jishuo Yang, Xiangzhao Wang, Sikun Li et al. · Optical Engineering · 2013 · 10 citations

Natural Sciences, Computer Science, Computer Vision +14

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